Structural evolution of vacuum annealing of PECVD SiC thin films for high temperature MEMS applications by B. Bharathkumar; supervised by Raj Kishora Dash

Bharathkumar, B.
Call Number
PR620 B46S
Author
Bharathkumar, B.
Title
Structural evolution of vacuum annealing of PECVD SiC thin films for high temperature MEMS applications by B. Bharathkumar; supervised by Raj Kishora Dash
Publication
Hyderabad: University of Hyderabad, 2015.
Physical Description
40p.
Notes
Project Report (M.Tech.) - SEST - UoH
Added Author
Dash, Raj Kishora; supervisor
Subject
MATERIALS ENGINEERING - PROJECT REPORT
ENGINEERING SCIENCES AND TECHNOLOGY - PROJECT REPORT
Total Ratings: 0
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Notes
Project Report (M.Tech.) - SEST - UoH
Subject
MATERIALS ENGINEERING - PROJECT REPORT
ENGINEERING SCIENCES AND TECHNOLOGY - PROJECT REPORT