Journal of vacuum science and technology
| Title | Journal of vacuum science and technology Microelectronics procesing and phenomena |
| Publication | New York: American Institute of Physics 1964. |
| Physical Description | Print |
| Subject | Physics-Periodicals. Medical Sciences-Communicable Diseases-Periodicals |
| Multimedia |
Total Ratings:
0
00809nasaa2200229 a 4500
001
vtls001522699
003
VRT
005
20150903161000.0
008
110720c mr1pdd 0 2eng d
022
$a 1071-1023
039
9
$a 201509031610 $b Pad $c 201508211137 $d sainadh $c 201204191358 $d pani $y 201107201020 $z pani
245
1
0
$a Journal of vacuum science and technology
247
1
0
$a Microelectronics procesing and phenomena
260
$a New York: $b American Institute of Physics $c 1964.
300
$a Print
310
$a Bimonthly
650
0
$a Physics-Periodicals.
650
0
$a Medical Sciences-Communicable Diseases-Periodicals
780
1
0
$a Journal of Vacuum Science and Technology
856
$u http://ojps.aip.org/jvstb
999
$a VIRTUA
999
$a VTLSSORT0080*0220*2450*2470*2600*3000*3100*6500*6501*7800*8560*9992
No Reviews to Display
| Subject | Physics-Periodicals. Medical Sciences-Communicable Diseases-Periodicals |
| Multimedia |