Glow discharge processes : sputtering and plasma etching / Brian Chapman.
Chapman, Brian N.| Call Number | 537.52 C36G |
| Author | Chapman, Brian N. |
| Title | Glow discharge processes : sputtering and plasma etching / Brian Chapman. |
| Publication | New York : Wiley, 1980. |
| Physical Description | xv, 406 p. : ill. ; 24 cm. |
| Notes | "A Wiley-Interscience publication." Includes index. |
| Subject | SPUTTERING (PHYSICS) GLOW DISCHARGES. PLASMA ETCHING. |
| Multimedia |
Total Ratings:
0
01175cam a2200337 i 4500
001
vtls000148711
003
VRT
005
20050328122600.0
008
050328s1980 nyua b 001 0 eng
010
$a 80-017047
020
$a 047107828X : $c $26.95 (est.)
035
$a (OCoLC)ocm06379539
039
9
$y 200503281226 $z pjr
040
$a DLC $c DLC
049
$a IIUOH
082
0
0
$a 537.52 $b C36G
100
1
$a Chapman, Brian N.
245
1
0
$a Glow discharge processes : $b sputtering and plasma etching / $c Brian Chapman.
260
$a New York : $b Wiley, $c 1980.
300
$a xv, 406 p. : $b ill. ; $c 24 cm.
500
$a "A Wiley-Interscience publication."
500
$a Includes index.
504
$a Bibliography: p. 397-400.
650
0
$a SPUTTERING (PHYSICS)
650
0
$a GLOW DISCHARGES.
650
0
$a PLASMA ETCHING.
856
4
2
$3 Publisher description $u http://www.loc.gov/catdir/description/wiley034/80017047.html
856
4
$3 Table of Contents $u http://www.loc.gov/catdir/toc/onix05/80017047.html
994
$a C0 $b IIUOH
999
$a VIRTUA
999
$a VTLSSORT0010*0030*0080*0100*0400*0200*0820*0490*1000*2450*2600*3000*5000*5040*5001*6500*6501*6502*8560*8561*9940*9991
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| Notes | "A Wiley-Interscience publication." Includes index. |
| Subject | SPUTTERING (PHYSICS) GLOW DISCHARGES. PLASMA ETCHING. |
| Multimedia |