Thin-film deposition : principles and practice / Donald L. Smith.
Smith, Donald L. (Donald Leonard), 1944-| Call Number | 621.38173 Sm54T |
| Author | Smith, Donald L. 1944- |
| Title | Thin-film deposition : principles and practice / Donald L. Smith. |
| Publication | New York : McGraw-Hill, c1995. |
| Physical Description | xxiii, 616 p. : ill. ; 24 cm. |
| Subject | THIN FILMS. Vapor-plating. Thin film devices. Thin films. Materiais e dispositivos semicondutores Deposicao de vapor (engenharia eletrica) |
| Multimedia |
Total Ratings:
0
01312cam a2200373 a 4500
001
vtls000148710
003
VRT
005
20050328122400.0
008
050328s1995 nyua b 001 0 eng
010
$a 94-047002
015
$a GB95-45794
020
$a 0070585024
020
$a 0071139133 (International ed.)
035
$a (OCoLC)ocm31782845
039
9
$y 200503281224 $z pjr
040
$a DLC $c DLC $d CUY $d UKM $d GZM $d UBA
049
$a IIUOH
082
0
0
$a 621.38173 $b Sm54T
100
1
$a Smith, Donald L. $q (Donald Leonard), $d 1944-
245
1
0
$a Thin-film deposition : $b principles and practice / $c Donald L. Smith.
260
$a New York : $b McGraw-Hill, $c c1995.
300
$a xxiii, 616 p. : $b ill. ; $c 24 cm.
504
$a Includes bibliographical references and index.
650
0
$a THIN FILMS.
650
0
$a Vapor-plating.
650
0
$a Thin film devices.
650
4
$a Thin films.
650
7
$a Materiais e dispositivos semicondutores $2 larpcal
650
7
$a Deposicao de vapor (engenharia eletrica) $2 larpcal
653
0
$a THIN FILMS
856
4
1
$3 Table of contents $u http://www.loc.gov/catdir/toc/mh022/94047002.html
994
$a C0 $b IIUOH
999
$a VIRTUA
999
$a VTLSSORT0010*0030*0080*0100*0400*0150*0200*0201*0820*0490*1000*2450*2600*3000*5040*6500*6501*6502*6503*6504*6505*6530*8560*9940*9991
No Reviews to Display
| Subject | THIN FILMS. Vapor-plating. Thin film devices. Thin films. Materiais e dispositivos semicondutores Deposicao de vapor (engenharia eletrica) |
| Multimedia |