Principles of lithography by Harry J. Levinson.
Levinson, Harry J.| Call Number | 621.38153 L57P |
| Author | Levinson, Harry J. |
| Title | Principles of lithography by Harry J. Levinson. |
| Edition | 2nd ed. |
| Publication | Bellingham : SPIE Press, 2005. |
| Physical Description | xii, 423 p. : ill. ; 26 cm. |
| Series | Press monograph series ; PM146 |
| Subject | Integrated circuits Design and construction. MICROLITHOGRAPHY. |
| Multimedia |
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$a xii, 423 p. : $b ill. ; $c 26 cm.
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$a SPIE monograph ; $v PM146.
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| Subject | Integrated circuits Design and construction. MICROLITHOGRAPHY. |
| Multimedia |