Micromachined thin-film sensor for SOI-CMOS Co-Integration by J. Laconte, D. flandre and J. -P. Raskin
Laconte, J.| Call Number | 530.41 L11M |
| Author | Laconte, J. |
| Title | Micromachined thin-film sensor for SOI-CMOS Co-Integration by J. Laconte, D. flandre and J. -P. Raskin |
| Publication | Netherlands: Springer Verlag, 2006. |
| Physical Description | 292p |
| Added Author | Flandre, D. Raskin, J. -P. |
| Subject | thin films - sensors |
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| Subject | thin films - sensors |