Optical diagnostics for thin film processing Irving P. Herman.
Herman, Irving P.| Call Number | 621.3817 H42O |
| Author | Herman, Irving P. |
| Title | Optical diagnostics for thin film processing Irving P. Herman. |
| Publication | San Diego, CA : Academic Press, 1996. |
| Physical Description | 783 p. |
| Subject | Thin Films - Surfaces. Spectrum Analysis - Industrial applications. |
Total Ratings:
0
00990cam a2200301 a 4500
001
vtls001451706
003
VRT
005
20090606120600.0
008
950425s1996 caua b 001 0 eng
010
$a 95-016540
015
$a GB96-88027
019
$a 36121551
020
$a 0123420709 (acid-free paper)
029
1
$a UKM $b b9688027
029
1
$a NLGGC $b 139691588
039
9
$a 200906061206 $b pjr $c 200606301538 $d 361 $c 200512131507 $d 696yak $y 200512131507 $z 696yak
040
$a DLC $c DLC $d UKM $d NLGGC
049
$a IIUOH
082
0
0
$a 621.3817 $b H42O
100
1
$a Herman, Irving P.
245
1
0
$a Optical diagnostics for thin film processing $c Irving P. Herman.
260
$a San Diego, CA : $b Academic Press, $c 1996.
300
$a 783 p.
650
0
$a Thin Films - Surfaces.
650
0
$a Spectrum Analysis - Industrial applications.
994
$a C0 $b IIUOH
999
$a VIRTUA
999
$a VTLSSORT0010*0030*0080*0100*0400*0150*0190*0200*0290*0291*0820*0490*1000*2450*2600*3000*6500*6501*9940*9991
No Reviews to Display
| Subject | Thin Films - Surfaces. Spectrum Analysis - Industrial applications. |