Interlayer dielectrics for semiconductor technologies S. p. Murarka, M. Eizenberg and A. K. Sinha

Murarka, S. P.
Call Number
537.622 M93I
Author
Murarka, S. P.
Title
Interlayer dielectrics for semiconductor technologies S. p. Murarka, M. Eizenberg and A. K. Sinha
Publication
Amsterdam : Elsevier , 2003
Physical Description
444p
Added Author
Eizenberg, M.
Sinha, A. K.
Subject
Interlayers - Dielectrics
Interlayer - Semiconductor Technologies
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
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Subject
Interlayers - Dielectrics
Interlayer - Semiconductor Technologies