Reactive sputter depositions D. Depla and S. Mahieu

Depla, D.
Call Number
621.3817 D44R
Author
Depla, D.
Title
Reactive sputter depositions D. Depla and S. Mahieu
Publication
Berlin : Springer-Verlag , 2008
Physical Description
570p
Series
Springer series in materials science; No. 109
Added Author
Mahieu, S.
Subject
THIN FILMS
Gathods Sputlering - Plating Process
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
ACRHEM 621.3817 D44R 250962 Books 1 Available
 
 
 
00722nam a2200229   4500
001
 
 
vtls001477964
003
 
 
VRT
005
 
 
20081025142400.0
008
 
 
080604                       00    eng 
020
$a 978-3-540-76662-9
039
9
$a 200810251424 $b pjr $y 200806041018 $z siva
082
$a 621.3817 $b D44R
100
$a Depla, D.
245
$a Reactive sputter depositions $c D. Depla and S. Mahieu
260
$a Berlin : $b Springer-Verlag , $c 2008
300
$a 570p
440
0
$a Springer series in materials science; No. 109
650
0
$a THIN FILMS
650
0
$a Gathods Sputlering - Plating Process
700
$a Mahieu, S.
999
$a VIRTUA4
999
$a VTLSSORT0010*0030*0080*0200*0820*1000*2450*2600*3000*4400*6500*6501*7000*9991
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Subject
THIN FILMS
Gathods Sputlering - Plating Process