Rapid thermal and integrated processing V : symposium held April 8-12,1996. edited by J.C. Gelpey and Others
Symposium Proceedings ,April8-12,1996.San Francisco, California.| Call Number | 621.38152 Sy68R |
| Author | Symposium Proceedings ,April8-12,1996.San Francisco, California. |
| Title | Rapid thermal and integrated processing V : symposium held April 8-12,1996. edited by J.C. Gelpey and Others Rapid thermal and integrated processing five Rapid thermal and integrated processing 5 |
| Publication | Pittsburgh, Pa. : Materials Research Society, c1996. |
| Physical Description | xi, 389 p. : ill. ; 24 cm. |
| Series | Materials Research Society symposium proceedings ; v. 429 |
| Added Author | Gelpey, Jeffrey C. Materials Research Society. |
| Subject | Semiconductors Heat treatment Congresses. Semiconductor doping Congresses. Vapor-plating Congresses. Rapid thermal processing Congresses. |
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| Subject | Semiconductors Heat treatment Congresses. Semiconductor doping Congresses. Vapor-plating Congresses. Rapid thermal processing Congresses. |