Introduction to microfabrication / Sani Franssila.
Franssila, Sami.| Call Number | 621.3 F84I |
| Author | Franssila, Sami. |
| Title | Introduction to microfabrication / Sani Franssila. |
| Publication | Chichester : John Wiley, c2004. |
| Physical Description | xvii, 401 p. : ill. ; 25 cm. |
| Subject | Microelectromechanical systems. ELECTRONIC APPARATUS AND APPLIANCES. Microfabrication. |
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| Subject | Microelectromechanical systems. ELECTRONIC APPARATUS AND APPLIANCES. Microfabrication. |