Fundamentals of microfabrication and nanotechnology from MEMS to Bio-MEMS and Bio-MEMS Manufacturing techniques and applications by Marc J. Madou
Madou, Marc J| Call Number | 620.5 M26F |
| Author | Madou, Marc J. |
| Title | Fundamentals of microfabrication and nanotechnology from MEMS to Bio-MEMS and Bio-MEMS Manufacturing techniques and applications by Marc J. Madou |
| Edition | 3rd edition |
| Publication | Boca Ratan: CRC Press Publications, 2012. |
| Physical Description | 636p. |
| Subject | ENGINEERING AND ALLIED OPERATIONS - MEMS AND BIO-MEMS MICROFABRICATION - NANOTECHNOLOGY |
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| Subject | ENGINEERING AND ALLIED OPERATIONS - MEMS AND BIO-MEMS MICROFABRICATION - NANOTECHNOLOGY |