Plasma electronics : applications in microelectronic device fabrication / by T. Makabe and Z. Petrovic.
Makabe, Toshiaki| Call Number | 530.44 M28P |
| Author | Makabe, Toshiaki |
| Title | Plasma electronics : applications in microelectronic device fabrication / by T. Makabe and Z. Petrovic. |
| Publication | London : Taylor & Francis, 2006. |
| Physical Description | 339 p. ; 23 cm. |
| Series | Series in plasma physics |
| Added Author | Petrovi�c, Z. |
| Subject | Plasma engineering. |
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$a Plasma electronics : $b applications in microelectronic device fabrication / $c by T. Makabe and Z. Petrovic.
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$a 339 p. ; $c 23 cm.
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$a Series in plasma physics
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$a Includes bibliographical references and index.
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| Subject | Plasma engineering. |