Micro electro mechanical system design / James J. Allen.
Allen, James J.| Call Number | 621 Al53M |
| Author | Allen, James J. |
| Title | Micro electro mechanical system design / James J. Allen. |
| Publication | Boca Raton : Taylor & Francis, 2005. |
| Physical Description | 465 p. : ill. ; 23 cm. |
| Series | Mechanical engineering ; 192 |
| Subject | Microelectromechanical systems Design and construction. ENGINEERING DESIGN. |
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| Subject | Microelectromechanical systems Design and construction. ENGINEERING DESIGN. |