Fast simulation of electro-thermal MEMS efficient dynamic compact models T. Bechtold, E.B. Rudnyi, J.G. Korvink.
Bechtold, T.| Call Number | 621.3811 B38F |
| Author | Bechtold, T. |
| Title | Fast simulation of electro-thermal MEMS efficient dynamic compact models T. Bechtold, E.B. Rudnyi, J.G. Korvink. |
| Publication | Berlin ; New York : Springer, 2007. |
| Physical Description | xi, 180 p. : ill. (some col.) ; 24 cm. |
| Series | Microtechnology and MEMS, 1439-6599 |
| Added Author | Korvink, J. G. Rudnyi, E. B. |
| Subject | Microelectromechanical systems Mathematical models. |
| Multimedia |
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| Subject | Microelectromechanical systems Mathematical models. |
| Multimedia |