Introductory MEMS fabrication and applications by Thomas M.Adams and Richard A.Layton

Adams, Thomas M.
Call Number
621.381 Ad19M
Author
Adams, Thomas M.
Title
Introductory MEMS fabrication and applications by Thomas M.Adams and Richard A.Layton
Publication
New Yark: Springer, 2010.
Physical Description
444p.
Added Author
Layton, Richard A.
Subject
MICRO ELECTRO MECHANICAL SYSTEM
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
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100601                       00    eng 
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$a Introductory MEMS $b fabrication and applications $c by Thomas M.Adams and Richard A.Layton
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Subject
MICRO ELECTRO MECHANICAL SYSTEM