Handbook of silican based mems meterials and technologies. by veikko Lindroos and others.

Call Number
546.683 H19-
Title
Handbook of silican based mems meterials and technologies. by veikko Lindroos and others.
Publication
Amsterdam: Elsevier, 2010.
Physical Description
636p.
Added Author
Lindroos, Veikko.
Subject
SILICON - MATERIALS - TECHNOLOGY.
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
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$a Handbook of silican based mems meterials and technologies. $c by veikko Lindroos and others.
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Subject
SILICON - MATERIALS - TECHNOLOGY.