Fundamentals electron interactions with plasma processing gases by Loucas G. Christophorou and James K. Olthoff

Christophorou, Loucas G.
Call Number
539.754 C46F
Author
Christophorou, Loucas G.
Title
Fundamentals electron interactions with plasma processing gases by Loucas G. Christophorou and James K. Olthoff
Publication
New York: Kluwer Academic / Plenum Publishers, 2004.
Physical Description
776p.
Series
physics of atoms and molecules
Added Author
Olthoff, James K.
Subject
ELECTRON - MOLECULE COLLISIONS
PLASMA (IONIZED GASES)
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
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$a Fundamentals electron interactions with plasma processing gases $c by Loucas G. Christophorou and James K. Olthoff
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Subject
ELECTRON - MOLECULE COLLISIONS
PLASMA (IONIZED GASES)