X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner.

Bowen, D. Keith (David Keith), 1940-
Call Number
621.38152 B67X
Author
Bowen, D. Keith 1940-
Title
X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner.
Publication
Boca Raton : CRC/Taylor & Francis, 2006.
Physical Description
279 p. : ill. ; 25 cm.
Added Author
Tanner, B. K.
Subject
Semiconductors Design and construction Quality control.
Integrated circuits Measurement.
Semiconductor wafers Inspection.
X-rays Diffraction.
Fluroscopy.
Total Ratings: 0
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$a Semiconductors $x Design and construction $x Quality control.
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$a Integrated circuits $x Measurement.
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$a Semiconductor wafers $x Inspection.
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$a X-rays $x Diffraction.
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Subject
Semiconductors Design and construction Quality control.
Integrated circuits Measurement.
Semiconductor wafers Inspection.
X-rays Diffraction.
Fluroscopy.