MEMS/MOEMS packaging : concepts, designs, metarials, and processes / Ken Gilleo.
Gilleo, Ken.| Call Number | 621.381046 G41M |
| Author | Gilleo, Ken. |
| Title | MEMS/MOEMS packaging : concepts, designs, metarials, and processes / Ken Gilleo. |
| Publication | New York : McGraw-Hill, c2005. |
| Physical Description | xiii, 220 p. : ill. ; 24 cm. |
| Subject | Microelectronic packaging. Microelectromechanical systems. OPTOELECTRONIC DEVICES. |
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$a MEMS/MOEMS packaging : $b concepts, designs, metarials, and processes / $c Ken Gilleo.
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$a New York : $b McGraw-Hill, $c c2005.
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$a xiii, 220 p. : $b ill. ; $c 24 cm.
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$a Includes bibliographical references (p. 203-213) and index.
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$a Microelectronic packaging.
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$a Microelectromechanical systems.
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$a OPTOELECTRONIC DEVICES.
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| Subject | Microelectronic packaging. Microelectromechanical systems. OPTOELECTRONIC DEVICES. |