Microfabrication and nanomanufacturing / edited by Mark J. Jackson.
Jackson, Mark J.| Call Number | 620.4 J13M |
| Author | Jackson, Mark J. |
| Title | Microfabrication and nanomanufacturing / edited by Mark J. Jackson. |
| Publication | New York : CRC ; London : Taylor & Francis [distributor], 2006. |
| Physical Description | p. cm. |
| Added Author | Jackson, Mark J. |
| Subject | MICROELECTRONICS. Integrated circuits Design and construction. Microelectromechanical systems Design and construction. |
Total Ratings:
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| Subject | MICROELECTRONICS. Integrated circuits Design and construction. Microelectromechanical systems Design and construction. |