X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner.

Bowen, D. Keith (David Keith), 1940-
cover image
Call Number
621.38152 B67X
Author
Bowen, D. Keith 1940-
Title
X-ray metrology in semiconductor manufacturing / D. Keith Bowen, Brian K. Tanner.
Publication
Boca Raton : CRC/Taylor & Francis, 2006.
Physical Description
279 p. : ill. ; 25 cm.
Added Author
Tanner, B. K.
Subject
Semiconductors Design and construction Quality control.
Integrated circuits Measurement.
Semiconductor wafers Inspection.
X-rays Diffraction.
Fluroscopy.
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
ACRHEM 621.38152 B67X 226993 Books 1 Available
 
 
 
01460cam a22003854a 4500
001
 
 
vtls001456142
003
 
 
VRT
005
 
 
20060904115000.0
008
 
 
050825s2006    flua     b    001 0 eng 
010
$a 2005-052196
015
$a GBA597324 $2 bnb
016
7
$a 013338095 $2 Uk
020
$a 0849339286 (alk. paper)
029
1
$a IG# $b 0849339286
039
9
$a 200609041150 $b pjr $c 200606241244 $d 696yak $y 200606241244 $z 696yak
040
$a DLC $c DLC $d YDX $d UKM $d BAKER $d IG#
042
$a pcc
049
$a IIUOH
082
0
0
$a 621.38152 $b B67X
100
1
$a Bowen, D. Keith $q (David Keith), $d 1940-
245
1
0
$a X-ray metrology in semiconductor manufacturing / $c D. Keith Bowen, Brian K. Tanner.
260
$a Boca Raton : $b CRC/Taylor & Francis, $c 2006.
300
$a 279 p. : $b ill. ; $c 25 cm.
504
$a Includes bibliographical references and index.
650
0
$a Semiconductors $x Design and construction $x Quality control.
650
0
$a Integrated circuits $x Measurement.
650
0
$a Semiconductor wafers $x Inspection.
650
0
$a X-rays $x Diffraction.
650
0
$a Fluroscopy.
700
1
$a Tanner, B. K. $q (Brian Keith)
938
$a Baker & Taylor $b BKTY $c 129.95 $d 129.95 $i 0849339286 $n 0006589410 $s active
938
$a Ingram $b INGR $n 0849339286
994
$a C0 $b IIUOH
999
$a VIRTUA               
999
$a VTLSSORT0010*0030*0080*0100*0400*0150*0160*0200*0290*0420*0820*0490*1000*2450*2600*3000*5040*6500*6501*6502*6503*6504*7000*9380*9381*9940*9991
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Subject
Semiconductors Design and construction Quality control.
Integrated circuits Measurement.
Semiconductor wafers Inspection.
X-rays Diffraction.
Fluroscopy.