Foundations of MEMS Chang Liu.
Liu, Chang, Ph.D.| Call Number | 621.3 L74F |
| Author | Liu, Chang, Ph.D. |
| Title | Foundations of MEMS Chang Liu. |
| Publication | Upper Saddle River, NJ : Pearson/Prentice Hall, 2006. |
| Physical Description | 530 p. |
| Subject | Microelectromechanical systems. |
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| Subject | Microelectromechanical systems. |