Post-process techniques for integrated MEMS / Sherif Sedky.
Sedky, Sherif.| Call Number | 621.381 Se27P |
| Author | Sedky, Sherif. |
| Title | Post-process techniques for integrated MEMS / Sherif Sedky. |
| Publication | Boston : Artech House, c2006. |
| Physical Description | xiv, 207 p. : ill. ; 23 cm. |
| Series | Microelectromechanical systems series |
| Subject | Microelectromechanical systems. |
Total Ratings:
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$a Post-process techniques for integrated MEMS / $c Sherif Sedky.
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$a Boston : $b Artech House, $c c2006.
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$a xiv, 207 p. : $b ill. ; $c 23 cm.
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$a Microelectromechanical systems series
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$a Includes bibliographical references and index.
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$a Microelectromechanical systems.
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$a Baker & Taylor $b BKTY $c 99.00 $d 99.00 $i 1580539017 $n 0006515000 $s active $z B&T Title: Post-Processing Techniques for Integrated MEMS
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| Subject | Microelectromechanical systems. |