Optical microscanners and microspectrometers using thermal bimorph actuators Gerhard Lammel, Sandra Schweizer and Philippe Renaud.
Lammel, Gerhard.| Call Number | 621.367 L18O |
| Author | Lammel, Gerhard. |
| Title | Optical microscanners and microspectrometers using thermal bimorph actuators Gerhard Lammel, Sandra Schweizer and Philippe Renaud. |
| Publication | Boston: Kluwer Academic, 2002. |
| Physical Description | 268 p. |
| Series | Microsystems ; v. 8 |
| Added Author | Schweizer, Sandra. Renaud, Philippe, Prof. |
| Subject | Microelectromechanical systems. Optical scanners. Optical spectrometers. |
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| Subject | Microelectromechanical systems. Optical scanners. Optical spectrometers. |