Silicon wet bulk micromachining for MEMS by Prem Pal and Kazuo Sato
Pal, Prem| Call Number | 621.3811 P17S |
| Author | Pal, Prem |
| Title | Silicon wet bulk micromachining for MEMS by Prem Pal and Kazuo Sato |
| Publication | Boca Raton: CRC Press, 2017. |
| Physical Description | xii, 412 p. |
| Added Author | Sato, Kazuo |
| Subject | Microelectromechanical systems Micromachining |
Total Ratings:
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$a Silicon wet bulk micromachining for MEMS $c by Prem Pal and Kazuo Sato
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$a Boca Raton: $b CRC Press, $c 2017.
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$a xii, 412 p.
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$a Includes bibliographical references and index.
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$a Microelectromechanical systems
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| Subject | Microelectromechanical systems Micromachining |