Contamination-free manufacturing for semiconductors and other precision products Edited by Robert P.Donovan
Donovan, Robert P.| Call Number | 621.38152 D71C |
| Author | Donovan, Robert P. |
| Title | Contamination-free manufacturing for semiconductors and other precision products Edited by Robert P.Donovan |
| Publication | New York : Marcel Dekker,Inc., 2001. |
| Physical Description | 448p. |
| Subject | Semiconductors - Manufacturing |
Total Ratings:
0
00705nam a2200193 4500
001
vtls001458236
003
VRT
005
20061208135600.0
008
061004 00 eng
020
$a 0 - 8247 - 0380 - 4
039
9
$a 200612081356 $b pjr $c 200612071148 $d pjr $c 200610041453 $d gsr $y 200610041453 $z gsr
082
$a 621.38152 $b D71C
100
$a Donovan, Robert P.
245
$a Contamination-free manufacturing for semiconductors and other precision products $c Edited by Robert P.Donovan
260
$a New York : $b Marcel Dekker,Inc., $c 2001.
300
$a 448p.
650
0
$a Semiconductors - Manufacturing
999
$a VIRTUA4
999
$a VTLSSORT0010*0030*0080*0200*0390*0820*1000*2450*2600*3000*6500*9991
No Reviews to Display
| Subject | Semiconductors - Manufacturing |