Plasma techniques for film deposition / Mitsuharu Konuma.
Konuma, Mitsuharu, 1950-| Call Number | 621.3817 K83P |
| Author | Konuma, Mitsuharu, 1950- |
| Title | Plasma techniques for film deposition / Mitsuharu Konuma. |
| Publication | Harrow, U.K. : Alpha Science International, c2005. |
| Physical Description | ix, 337 p. : ill. ; 25 cm. |
| Notes | "[Originally published in 1992 as] Film deposition by plasma techniques, Springer-Verlag ... Some of the contents, especially the first half ... is based upon the old book ... however, many parts of the text and figures have been completely updated and revised"--Pref. |
| Added Author | Konuma, Mitsuharu, 1950- |
| Subject | Plasma-enhanced chemical vapor deposition. THIN FILMS. |
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| Notes | "[Originally published in 1992 as] Film deposition by plasma techniques, Springer-Verlag ... Some of the contents, especially the first half ... is based upon the old book ... however, many parts of the text and figures have been completely updated and revised"--Pref. |
| Subject | Plasma-enhanced chemical vapor deposition. THIN FILMS. |