Materials science in microelectronics E.S. Machlin.
Machlin, E. S.| Call Number | 621.38152 M13M |
| Author | Machlin, E. S. |
| Title | Materials science in microelectronics E.S. Machlin. |
| Edition | 2nd ed. |
| Publication | Amsterdam ; London : Elseveir, 2005-2006. |
| Physical Description | 2 v. |
| Notes | Previous ed.: v. 1. 1995, v. 2. 1998. |
| Contents | v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films. |
| Subject | THIN FILMS. MICROELECTRONICS. |
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| Notes | Previous ed.: v. 1. 1995, v. 2. 1998. |
| Contents | v. 1. The relationships between thin film processing and structure -- v. 2. The effects of structure on properties in thin films. |
| Subject | THIN FILMS. MICROELECTRONICS. |