Predictive simulation of semiconductor processing : status and challenges / edited by J. Dabrowski and E.R. Weber.
Dabrowski, J.| Call Number | 621.38152 D11P |
| Author | Dabrowski, J |
| Title | Predictive simulation of semiconductor processing : status and challenges / edited by J. Dabrowski and E.R. Weber. |
| Publication | Berlin ; London : Springer, 2004. |
| Physical Description | 470 p. : ill. |
| Series | Springer series in materials science ; v. 72 |
| Added Author | Dabrowski, J. Weber, Eicke R. |
| Subject | Semiconductors Design and construction Computer simulation. |
Total Ratings:
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| Subject | Semiconductors Design and construction Computer simulation. |