Microlithography : science and technology edited by Kazuaki Suzuki and Bruce W. Smith.
Suzuki,Kazuaki.| Call Number | 621.38153 Su99M |
| Author | Suzuki,Kazuaki. |
| Title | Microlithography : science and technology edited by Kazuaki Suzuki and Bruce W. Smith. |
| Edition | 2nd ed. |
| Publication | New York : CRC Press, 2007. |
| Physical Description | 848 p. : ill. ; 23 cm. |
| Series | Optical Science and Engineering |
| Added Author | Smith, Bruce W. |
| Subject | Microlithography Industrial applications. Integrated circuits Masks. Metal oxide semiconductors, Complementary Design and construction. Manufacturing processes. |
Total Ratings:
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| Subject | Microlithography Industrial applications. Integrated circuits Masks. Metal oxide semiconductors, Complementary Design and construction. Manufacturing processes. |