MEMS : design and fabrication / edited by Mohamed Gad-el-Hak.
Gad-el-Hak,Mohamed.| Call Number | 621.381 G11M |
| Author | Gad-el-Hak,Mohamed. |
| Title | MEMS : design and fabrication / edited by Mohamed Gad-el-Hak. |
| Edition | 2nd ed. |
| Publication | Boca Raton, FL : CRC/Taylor & Francis, 2006. |
| Physical Description | 1 v. (various pagings) : ill. ; 26 cm. |
| Series | Mechanical engineering series |
| Added Author | Gad-el-Hak, Mohamed, 1945- |
| Subject | Microelectromechanical systems Design and construction. Microfabrication. |
Total Ratings:
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$a MEMS : $b design and fabrication / $c edited by Mohamed Gad-el-Hak.
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$a 2nd ed.
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$a Boca Raton, FL : $b CRC/Taylor & Francis, $c 2006.
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$a 1 v. (various pagings) : $b ill. ; $c 26 cm.
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$a Mechanical engineering series
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$a Microelectromechanical systems $x Design and construction.
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$a Microfabrication.
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$a Gad-el-Hak, Mohamed, $d 1945-
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| Subject | Microelectromechanical systems Design and construction. Microfabrication. |