Silicon wet bulk micromachining for MEMS by Prem Pal and Kazuo Sato

Pal,Prem
Call Number
621.3811 P17S
Author
Pal,Prem
Title
Silicon wet bulk micromachining for MEMS by Prem Pal and Kazuo Sato
Publication
Singapore: Pan Stanford Publishing , 2017.
Physical Description
412p.
Added Author
Sato Kazuo
Subject
Fabrication of microstructures
Micromachining
Total Ratings: 0
Location Call Number Barcode Item Class Units Copy Number Status  
IGM Library 621.3811 P17S 325865 Books 1 Available
 
 
 
00689nam a2200217   4500
001
 
 
vtls001590338
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VRT
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20230220101000.0
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220613                       00    eng 
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$a 621.3811 $b P17S
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$a Pal,Prem
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$a Silicon wet bulk micromachining for MEMS $c by  Prem Pal and Kazuo Sato
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$a Singapore: $b Pan Stanford Publishing , $c 2017.
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$a 412p.
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$a Fabrication of  microstructures
650
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$a Micromachining
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$a Sato Kazuo
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$a VTLSSORT0080*0200*0820*1000*2450*2600*3000*6500*6501*7000*9992
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Subject
Fabrication of microstructures
Micromachining