Analysis and design principles of MEMS devices / by Minhang Bao.
Bao, Min-Hang.| Call Number | 621.381 B22A |
| Author | Bao, Min-Hang. |
| Title | Analysis and design principles of MEMS devices / by Minhang Bao. |
| Publication | Amsterdam ; Oxford : Elsevier, 2005. |
| Physical Description | xii, 312 p. : ill. ; 25 cm. |
| Subject | Microelectromechanical systems. |
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| Subject | Microelectromechanical systems. |